12

Ion-implanted polysilicon diffusion sources

Year:
1983
Language:
english
File:
PDF, 427 KB
english, 1983
15

Dislocation reactions in arsenic-implanted and annealed silicon

Year:
1976
Language:
english
File:
PDF, 847 KB
english, 1976
25

Channeling in low energy boron ion implantation

Year:
1984
Language:
english
File:
PDF, 430 KB
english, 1984
29

The poly-single crystalline silicon interface

Year:
1984
Language:
english
File:
PDF, 633 KB
english, 1984